| Maximum scan range (XY) ¹ |
70 μm |
| Z-measurement noise level (RMS, Static mode) |
0.4 nm (max. 0.55 nm) |
| Z-measurement noise level (RMS, Dynamic mode) |
0.3 nm (max. 0.55 nm) |
| Automatic sample approach range |
4.5 mm |
| Alignment of cantilever |
Automatic self-adjustment through alignment chip technology |
| Sample observation |
Through LensAFM scan head, directly via optical microscope |
