Nanoscience Instruments

Trimos TR Scan

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TR Scan Specifications

The TR Scan can be configured with different stages for 1 dimensional, 2 dimensional, or 3 dimensional measurements. These models are numbered 100, 200, and 300, respectively.

Additionally, two different DHM heads can be chosed for each of these TR Scan models. The two models (S1 &S2) differ in range and resolution. Either, or both, DHM heads can be purchased with the TR Scan system.

Specifications on the TR Scan models and the DHM heads are listed below.

Motorized stage & support models:

TR Scan
100
200
300
x lateral range
--
100 mm
100 mm
y lateral range
--
--
100 mm
Vertical displancement (z)
240 mm

Digital Holographic Microscope (DHM) heads:

DHM
S1
S2
Vertical range (z)
5 µm
10 µm
Maximum vertical resolution (z)
1 nm
2 nm
Measuing point dimensions (x, y)
0.5 mm x 0.5 mm
1 mm x 1 mm
Maximum horizontal resolution (x & y)
0.8 µm
1.6 µm
Measuring distance
6 mm
12 mm
Max measuring speed (2D)
1 mm/s
2 mm/s
Max measuring speed (3D)
0.5 mm2/s
1 mm2/s