The Nanosurf®
EasyScan 2 Specifications
|
Electronics
|
|
|
|
Electronics size / weight |
470 x 120 x 80 mm / 2.4 kg |
|
Power Supply |
90 - 240 V~/ 30 W 50
/ 60 Hz |
|
Computer interface |
USB 1.1 |
|
Integrated USB hub |
2 Ports (100 mA max) |
|
Measurement channels |
16 bit A/D converters, up
to seven signals depending on configuration |
|
Scan generator |
16 bit D/A converter for
all axes |
|
Scan speed |
Up to 60ms / line at 128
datapoints / line |
|
Scan drive signals |
± 10 V, no high voltage! |
|
Scan area and data points |
Individual width / height,
up to 2048 x 2048 points |
|
Scan image rotation |
0° - 360° |
|
Sample tilt compensation |
Hardware X/Y-slope compensation |
|
Spectroscopy modes |
Single point measurements
or multiple measurements along a vector |
|
Spectroscopy measurement
averaging |
1-255 |
|
Spectroscopy data points |
Up to 2048 |
|
|
Adapters for former
easyScan Scan Heads available |
|
|
Software
|
|
|
Various charts of the scan
data can
be displayed simultaneously |
Line graph, Colour map, 3D
view, ... |
|
Customizable display and
parameter settings using user profiles |
|
On-line processing functions |
Mean fit, Polynomial fit,
Derived data, ... |
|
Quick evaluation functions |
Distance, angles, cross-section,
roughness, ... |
|
Data export |
BMP, ASCII, CSV, ... |
|
Very easy installation |
|
|
|
PC
Requirements (computer not included with system) |
|
|
|
Physical Type |
Desktop or Laptop |
|
Operating System |
Windows 2000, XP, Vista |
|
Minimum Hardware Recommendations |
Pentium 4/M or AMD Athlon processor,
256MB RAM, True color 1024x768
monitor, Hardware (HW) OpenGL graphics accelerator |
|
Data Port |
USB port |
|
|
|
Nanosurf
easyScan 2 Scripiting Interface |
|
|
|
Applications |
Automating measurement tasks,
lithography, custom evaluation functions, using
third party measurement equipment |
|
Included control software |
Windows Scripting Host: Visual
Basic Script, Java Script, ... |
|
Remote controlled by |
COM compatible languages:
LabView, MathLab, Visual Basic, Delphi, C++... |
|
|
|
| |
Nanosurf
easyScan 2 Signal Module: S |
|
|
|
Available monitor signals |
X-axis, Y-axis, Z-Axis, Approach,
Tip Voltage, STM Current or AFM Deflection, Excitation,
Amplitude, Phase |
|
Full scale corresponds to |
± 10 V, Excitation: ± 5 V |
|
Power supply output |
GND, + 15 V, - 15 V |
|
|
|
Nanosurf
easyScan 2 Signal Module: A |
|
|
|
All Signal Module S signals
|
|
Additional signal modulation
inputs |
X-axis, Y-axis, Z-Axis, Tip
voltage, Excitation |
|
Free connectors |
2 x Aux, connection made
on user request |
|
Modulation range |
± 10 V, Excitation: ± 5 V |
|
Additional analog user inputs |
2 x 16 bit A/D, ± 10 V |
|
Additional analog user outputs |
2 x 16 bit D/A, ± 10 V |
|
Synchronization output |
1 x TTL: start, point sync
pulses, variable width |
|
Additional modes |
Almost unlimited |
|
User inputs can optionally
be measured in all Imaging and Spectroscopy modes |
|
User outputs can be modulated
in Spectroscopy measurements |
|
|
|
|
STM
Measurements
|
|
|
|
STM Scan Head: |
500nm |
1µm |
500 nmLC |
1 µmLC |
|
Max. Scan range 1) |
500 nm |
1.0 µm |
500 nm |
1.0 µm |
|
Max. Z-range 1) |
200 nm |
200 nm |
200 nm |
200 nm |
|
Drive resolution Z 2) |
3 pm |
3 pm |
3 pm |
3 pm |
|
Drive resolution XY 2) |
7.6 pm |
15 pm |
7.6 pm |
15 pm |
|
Current set point |
0.1 - 100 nA in 25 pA steps |
0.2 - 20 nA in 5 pA steps |
|
| |
|
Imaging modes |
Constant Current (Topography),
Constant Height (Current) |
|
Spectroscopy modes |
Current-Voltage, Current-Distance |
|
Tip voltage |
± 10 V in 5mV steps |
|
Sample approach |
Stick-slip motor |
|
Sample size |
Max 10 mm diameter |
| |
| 1) These are
typical values |
2) Calculated
by dividing the maximum range by 16 bits; atomic resolution
on HOPG can be obtained with all
STMs |
| |
AFM
Measurements |
|
|
|
AFM Scan Head: |
10µm |
70µm |
110µm |
|
Maximum Scan range 1) |
10 µm |
70 µm |
110 µm |
|
Maximum Z-range 1) |
2 µm |
14 µm |
22 µm |
|
Drive resolution Z 2) |
0.027 nm |
0.21 nm |
0.34 nm |
|
Drive resolution XY 2) |
0.15 nm |
1.1 nm |
1.7 nm |
|
XY-Linearity Mean Error |
< 0.6 % |
< 1.2% |
< 0.6% |
Z measurement noise level
(RMS, Static Mode) |
0.07 nm
(max. 0.2 nm) |
0.6 nm
(max. 0.8 nm) |
0.4 nm
(max. 0.55 nm) |
Z measurement noise level
(RMS, Dynamic Mode) |
0.04 nm
(max. 0.07 nm) |
0.5 nm
(max. 0.8 nm) |
0.3 nm
(max. 0.55 nm) |
|
| |
|
Design |
Tripod Stand-alone |
|
Scan head weight |
350 g |
|
Sample observation optics |
Dual lens system (top/side
view) |
Sample size |
Unlimited |
|
Optical magnification |
Top 12 x / Side 10 x |
Automatic approach |
5 mm |
|
View field |
Top 4 x 4 mm / Side 5 x 3 mm |
Max. approach speed |
0.1 mm/s |
|
Sample illumination |
White LEDs |
Cantilever alignment |
Automatic adjustment |
|
Electrical connection to tip |
Available |
|
|
| |
| 1) Manufacturing
tolerances are ± 15 % for 10 µm and 70 µm, ± 10 % for
110 µm scan heads |
| 2) Calculated
by dividing the maximum range by 16 bits |
| |
AFM
Basic Module |
|
|
|
Imaging modes |
Static Force (Contact), Const.Force
(Topography), Const.Height (Deflection) |
|
Spectroscopy modes |
Force - Distance, Force -
Tip voltage |
|
Tip voltage |
± 10 V in 5mV steps |
|
The AFM Basic Module is required
for using AFM Scan Heads |
|
| |
AFM
Dynamic Module |
|
|
|
Additional imaging modes |
Dynamic Force (Intermittent
Contact, etc.),
Const. Amplitude (Topography),
Const. Height (Amplitude) |
|
Additional spectroscopy modes |
Amplitude - Distance |
|
Dynamic frequency range |
15 - 300 kHz |
|
Dynamic frequency resolution |
< 0.1 Hz |
|
The AFM Basic Module is required
for using the Dynamic AFM Module |
|
| |
AFM
Mode Extension Module |
|
|
|
Additional imaging modes |
Phase Contrast, Force Modulation,
Spreading Resistance |
|
Additional spectroscopy modes |
Phase - Distance, Current
- Voltage, Current - Distance, etc. |
|
Phase contrast range |
± 90° |
|
Phase contrast resolution |
< 0.05° |
|
Phase reference range |
0 - 360° |
|
Tip current measurement |
± 100 µA, 3 nA resolution |
Both the AFM Basic Module
and the AFM Dynamic Module are required when using
the AFM Mode Extension
Module. |
|
| |
AFM Probes |
|
|
|
Manufacturer Compatibility |
Applied Nanostructures,
Vistaprobes™, Nanosensors and Nanoworld® |
|
Mode Compatibility |
Static Force / Contact Mode,
Dynamic Force / Tapping / Alternating Contact Mode,
Spreading Resistance / Electrostatic Force Mode,
Force Modulation Mode,
Magnetic Force Mode |
|
Available Tip Types |
Standard pyramidal, Rotated pyramidal, Super Sharp, High Aspect Ratio, Tipless
Conducting, Magnetic, Diamond coated, and more |
|
Typical Load |
10 nN |
|
Typical DFM frequency |
190 kHz |
|
| |
Video
Module |
|
|
|
Camera system |
Dual video (top/side view)
|
|
Magnification |
Top 100 x / Side 70
x |
|
View Fields |
Top 3.2 x 2.7 mm / Side 4.1
x 3.4 mm |
|
Image pixels |
352 x 288 |
|
Video display |
In control software, can
be saved as JPEG |
|
Analog video output |
PAL Video-S |
|
| |
Micrometer
Translation Stage |
|
|
|
XY resolution |
< 0.5 µm |
|
Travel |
13 mm |
|
| Specifications
are subject to change without notice |