Nanomechanical Testing


The FT-NMT03 Nanomechanical Testing System is a nanorobotic system for the direct and accurate, in-situ SEM/FIB measurement of the mechanical properties of nanostructures. Testing principles such as compression, tensile, cyclic or fracture tests are enabled by applying a load with a microforce sensor onto the nanostructures while using position encoders to measure their deformation.

From the resulting force-versus-deformation (stress-versus-strain) curves, the material properties of these nanostructures are quantitatively determined. Furthermore, through the combination with sample holders that feature electrical connections, the combined electro-mechanical properties of nanostructures can be quantified.

Most nanomechanical metrology applications require complex sample preparation steps prior to the measurement. For this reason, the FT-NMT03 also features micro- and nanohandling capabilities using either force-sensing microgrippers or sharp, force-sensing tungsten tips, which enable the pickup, placing and attaching of nanostructures to a testing substrate. This combination of electro-mechanical metrology and nanohandling capabilities provides a complete solution for most nanomechanical testing applications.

Due to the compact dimensions of the FT-NMT03 Nanomechanical Testing System, the instrument can be used in combination with almost any full sized SEM/FIB. The system can be easily mounted und unmounted within a few minutes.

3-Axis Testing Platform with 2-axis Sample Stage

The FT-NMT03 features a 3-axis nanopositioning platform with nanometer-resolution for the mounting of FT-S Force Sensing Probes and FT-G Microgrippers. The sample holder is a motorized, 2-axis rotation stage (pitch/jaw) for mechanical testing at different angles. All linear axes are equipped with optical position encoders for closed-loop operation and automated measurement tasks. Optionally, the rotational axes can be equipped with encoders also.


High Resolution Piezoscanner

A linear, flexure-based piezo-scanner with capacitive position feedback enables fast and continous measurements with a resolution down to 0.05 nm. 

SEM Stub and Electrical Testing Module

Adapter units for mounting the SEM stub at different heights are provided to enable testing at the optical working distance of the SEM. Besides the standard SEM stubs, sample holders with electrical pads/connections are provided for simultaneous electrical and mechanical MEMS/NEMS testing.

Mounting Base and Electrical Feedtrough

We provide mechanical adapter bases and electrical feedtroughs for almost any scanning electron microscope system.

 FT-NMT03 Overview

FemtoTools Software Suite

The software suite for MS Windows enables plug-and-measure type nanomechanical testing (e.g. Compression/tensile testing, nanoindentation, cyclic testing, creep testing, automated line/array measurements) and nanoassembly. A library based on NI LabVIEW for the creation of customized micromechanical testing programs is provided as well.
FT-NMT03 Accessories
FT-NMT03 Accessories

Accessories for the FT-NMT03 Nanomechanical Testing System.