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Zeta-20 3D optical profiler

 

The Zeta-20 is an optical profiler that provides easy to use imaging and fast data collection. Patented Z-Dots provide focal plane detection with 10 nm Z resolution. The Zeta-20 easily measures high roughness, low reflectance surfaces. Unique transmissive and dark field illumination schemes as well as a variety of objectives allows the Zeta profilers to handle the most difficult of surfaces.

Wide field optics can measure high aspect ratio features from millimeters to the submicron range. Using reflectometry, film thicknesses can be measured down to 30 nm.

The Zeta-20 optical profiler has proven itself for industries requiring critical metrology measurements. Solar, LED, microfluidics, MEMS, CMP and semiconductor companies rely on the Zeta-20 every day for quality control and R&D.

Ease of use and low cost of the Zeta-20 also provides unique capabilities for many other industries and academic settings.

Zeta-20 Features

ZDotTM innovative 3D imaging is standard on all our optical profilers

  • Fast
  • Easy to use
  • Wide variety of surfaces can be measured, unlike most optical techniques:
    • Low reflectance
    • High reflectance
    • High roughness - measure features from mm to nm
    • Transparent
    • Opaque

.

Zeta-20 Options

Flexible Hardware & Software Options

In research, it is often unpredictable what type of surface you will need to measure.  With this in mind, the Zeta-300 has a modular design that allows for a wider range of hardware measurement options as well as software packages.

Optical Measurement Modes:

zeta20-meas_channels.png

  • Vertical Scanning Interferometry: ZX5
    • Measure nanometer heights over large field of view
  • Enhanced Differential Interference Contrast: ZiC
    • Nanometer level surface roughness
  • Shearing Interferometry: ZSi
    • Angstrom level vertical resolution
  • Reflectometry: ZFT 
    • Thin film thickness measurement option 


Hardware Fixtures:

zeta-options.png

Zeta-20

Optical System Parameters

Specifications for standard objectives are shown below. Other options available: long working distance objectives, immersion objectives, and through transmission materials objectives; 0.63X and 1X couplers. *XY resolution is nominal

   NA   Working Distance (mm)   Z resolution for ZDot (µm)   XY resolution (µm)   Optical resolution (µm)   FOV with 0.35X coupler   FOV with 0.5X coupler  
1/3" camera 2/3" camera 1/3" camera 2/3" camera
2.5X  0.08  10.7  22  3.60  4.20  5364 x 4024  9394 x 7044  3788 x 2840  6614 x 4960 
5X  0.15  20.0  5.9  1.80  2.20  2682 x 2012  4697 x 3522  1894 x 1420  3307 x 2480 
10X  0.30  11.0 1.5  0.90  1.10  1335 x 1000  2327 x 1745  944 x 708  1644 x 1233 
20X  0.45  3.1  0.5  0.45  0.75  668 x 500  1169 x 877  468 x 351  822 x 616 
50X  0.8  1.0  0.1  0.18  0.42  267 x 200  466 x 349  189 x 142  328 x 246 
100X  0.9 1.0 0.013 0.09  0.37  133 x 100  234 x 175  93 x 70  164 x 123 
150X  0.9  1.0  0.013  0.06  0.37  88 x 66  156 x 116  62 x 46  109 x 82