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Zeta-20 3D optical profiler
The Zeta-20 is a 3D optical profiler that provides easy to use true color imaging and fast data collection. The Zeta-20 easily measures high roughness, low reflectance surfaces. Unique transmissive and dark field illumination schemes as well as a variety of objectives allows the Zeta profilers to handle the most difficult of surfaces.
- Available with features and options described in our Optical Metrology Product Platform
- Patented ZDotTM technology delivers high repeatability
- Rapid, reliable data acquisition
- Operator-friendly, easy to learn GUI
- Dependable results without constant recalibration
- Automated data capture and analysis
- Ideal for analyzing complex surfaces
The Zeta-20 optical profiler has proven itself for industries requiring critical metrology measurements. Solar, LED, microfluidics, MEMS, CMP and semiconductor companies rely on the Zeta-20 every day for quality control and R&D.
Ease of use and low cost of the Zeta-20 also provides unique capabilities for many other industries and academic settings.
Optical System Parameters
Specifications for standard objectives are shown below. Other options available: long working distance objectives, immersion objectives, and through transmission materials objectives; 0.63X and 1X couplers. *XY resolution is nominal
|NA||Working Distance (mm)||Z resolution for ZDot (µm)||XY resolution (µm)||Optical resolution (µm)||FOV with 0.35X coupler||FOV with 0.5X coupler|
|1/3" camera||2/3" camera||1/3" camera||2/3" camera|
|2.5X||0.08||10.7||22||3.60||4.20||5364 x 4024||9394 x 7044||3788 x 2840||6614 x 4960|
|5X||0.15||20.0||5.9||1.80||2.20||2682 x 2012||4697 x 3522||1894 x 1420||3307 x 2480|
|10X||0.30||11.0||1.5||0.90||1.10||1335 x 1000||2327 x 1745||944 x 708||1644 x 1233|
|20X||0.45||3.1||0.5||0.45||0.75||668 x 500||1169 x 877||468 x 351||822 x 616|
|50X||0.8||1.0||0.1||0.18||0.42||267 x 200||466 x 349||189 x 142||328 x 246|
|100X||0.9||1.0||0.013||0.09||0.37||133 x 100||234 x 175||93 x 70||164 x 123|
|150X||0.9||1.0||0.013||0.06||0.37||88 x 66||156 x 116||62 x 46||109 x 82|