|Overview||Features||Options & Accessories||Gallery||Specifications|
Zeta-20 3D optical profiler
The Zeta-20 is an optical profiler that provides easy to use and fast data collection. Patented Z-Dots provide focus plane detection with unique accuracy - down to 12 nm. Using a focus plane detection provides speed – only the z dimension is scanned. Z-dots improve this detection beyond what any 3D microscope can provide and delivers data comparable with much more complex and expensive instruments.
The Zeta-20 easily measures high roughness, low reflectance surfaces. Wide field optics can measure high aspect ration features from millimeters to the submicron range, and film thickness down to 30nm.
This unique profiler has proven itself for industries requiring critical metrology measurements. Solar, LED, Microfluidics, MEMs, CMP and semiconductor companies rely on the Zeta 20 every day for quality control and R&D.
Ease of use and low cost of the Zeta-20 also provides unique capabilities for many other industries and academic settings.
ZDotTM innovative 3D imaging is standard on all our optical profilers
- Easy to use
- Huge variety of surfaces can be measured, unlike most optical techniques:
- Low reflectance
- High reflectance
- High roughness - measure features from mm to nm
Unique transmissive and dark field illumination schemes as well as a variety of objectives allows the Zeta profilers to handle the most ‘difficult’ of surfaces.
Optical Measurement modes:
- ZiC: Enhanced Differential Interference Contrast
- Nanometer level surface roughness
- ZSi: Shearing Interferometry
- Angstrom level vertical resolution
- ZX5 vertical scanning interferometry
- Measure nanometer heights over large field of view
- ZFT Reflectometry
- thin film thickness measurement option
Optical System Parameters
Specifications for standard objectives are shown below. Other options available: long working distance objectives, immersion objectives, and through transmission materials objectives; 0.63X and 1X couplers. *XY resolution is nominal
|NA||Working Distance (mm)||Z resolution for ZDot (µm)||XY resolution (µm)||Optical resolution (µm)||FOV with 0.35X coupler||FOV with 0.5X coupler|
|1/3" camera||2/3" camera||1/3" camera||2/3" camera|
|2.5X||0.08||10.7||22||3.60||4.20||5364 x 4024||9394 x 7044||3788 x 2840||6614 x 4960|
|5X||0.15||20.0||5.9||1.80||2.20||2682 x 2012||4697 x 3522||1894 x 1420||3307 x 2480|
|10X||0.30||11.1||1.5||0.90||1.10||1335 x 1000||2327 x 1745||944 x 708||1644 x 1233|
|20X||0.45||3.1||0.5||0.45||0.75||668 x 500||1169 x 877||468 x 351||822 x 616|
|50X||0.8||1.0||0.1||0.18||0.42||267 x 200||466 x 349||189 x 142||328 x 246|
|100X||0.9||1.0||0.013||0.09||0.37||133 x 100||234 x 175||93 x 70||164 x 123|
|150X||0.9||1.0||0.013||0.06||0.37||88 x 66||156 x 116||62 x 46||109 x 82|