Zeta-20 with Autostage with multi-mode optics Zeta-20 optical profiler with multi mode optics technology Zeta-20 with motorized XY stage Zeta-20 optical profiler with motorized XY stage Zeta-20 optical profiler Zeta-20 optical profiler
|Zeta-20||Zeta-20 Features||Zeta-20 Options & Accessories||Gallery||Zeta-20 Specifications|
Zeta-20 3D optical profiler
The Zeta-20 is an optical profiler that provides easy to use imaging and fast data collection. Patented Z-Dots provide focal plane detection with 10 nm Z resolution. The Zeta-20 easily measures high roughness, low reflectance surfaces. Unique transmissive and dark field illumination schemes as well as a variety of objectives allows the Zeta profilers to handle the most difficult of surfaces.
Wide field optics can measure high aspect ratio features from millimeters to the submicron range. Using reflectometry, film thicknesses can be measured down to 30 nm.
The Zeta-20 optical profiler has proven itself for industries requiring critical metrology measurements. Solar, LED, microfluidics, MEMS, CMP and semiconductor companies rely on the Zeta-20 every day for quality control and R&D.
Ease of use and low cost of the Zeta-20 also provides unique capabilities for many other industries and academic settings.
ZDotTM innovative 3D imaging is standard on all our optical profilers
- Easy to use
- Wide variety of surfaces can be measured, unlike most optical techniques:
- Low reflectance
- High reflectance
- High roughness - measure features from mm to nm
Flexible Hardware & Software Options
In research, it is often unpredictable what type of surface you will need to measure. With this in mind, the Zeta-300 has a modular design that allows for a wider range of hardware measurement options as well as software packages.
Optical Measurement Modes:
- Vertical Scanning Interferometry: ZX5
- Measure nanometer heights over large field of view
- Enhanced Differential Interference Contrast: ZiC
- Nanometer level surface roughness
- Shearing Interferometry: ZSi
- Angstrom level vertical resolution
- Reflectometry: ZFT
- Thin film thickness measurement option
Optical System Parameters
Specifications for standard objectives are shown below. Other options available: long working distance objectives, immersion objectives, and through transmission materials objectives; 0.63X and 1X couplers. *XY resolution is nominal
|NA||Working Distance (mm)||Z resolution for ZDot (µm)||XY resolution (µm)||Optical resolution (µm)||FOV with 0.35X coupler||FOV with 0.5X coupler|
|1/3" camera||2/3" camera||1/3" camera||2/3" camera|
|2.5X||0.08||10.7||22||3.60||4.20||5364 x 4024||9394 x 7044||3788 x 2840||6614 x 4960|
|5X||0.15||20.0||5.9||1.80||2.20||2682 x 2012||4697 x 3522||1894 x 1420||3307 x 2480|
|10X||0.30||11.0||1.5||0.90||1.10||1335 x 1000||2327 x 1745||944 x 708||1644 x 1233|
|20X||0.45||3.1||0.5||0.45||0.75||668 x 500||1169 x 877||468 x 351||822 x 616|
|50X||0.8||1.0||0.1||0.18||0.42||267 x 200||466 x 349||189 x 142||328 x 246|
|100X||0.9||1.0||0.013||0.09||0.37||133 x 100||234 x 175||93 x 70||164 x 123|
|150X||0.9||1.0||0.013||0.06||0.37||88 x 66||156 x 116||62 x 46||109 x 82|