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Zeta-20  Zeta-20 Specifications

Zeta-20 3D Optical Profiler

 

The Zeta-20 is a 3D optical profiler that provides easy to use true color imaging and fast data collection. The Zeta-20 easily measures high roughness, low reflectance surfaces. Unique transmissive and dark field illumination schemes as well as a variety of objectives allows the Zeta profilers to handle the most difficult of surfaces.

  • Available with features and options described in our Optical Metrology Product Platform
  • Patented ZDotTM technology delivers high repeatabilityFly wing edge 2D image
  • Rapid, reliable data acquisition
  • Operator-friendly, easy to learn GUI
  • Dependable results without constant recalibration
  • Automated data capture and analysis
  • Ideal for analyzing complex surfaces

The Zeta-20 optical profiler has proven itself for industries requiring critical metrology measurements. Solar, LED, microfluidics, MEMS, CMP and semiconductor companies rely on the Zeta-20 every day for quality control and R&D.

Ease of use and low cost of the Zeta-20 also provides unique capabilities for many other industries and academic settings.

Zeta-20 3D Optical Profiler

Optical System Parameters

Specifications for standard objectives are shown below. Other options available: long working distance objectives, immersion objectives, and through transmission materials objectives; 0.63X and 1X couplers. *XY resolution is nominal

   NA   Working Distance (mm)   Z resolution for ZDot (µm)   XY resolution (µm)   Optical resolution (µm)   FOV (µm) with 0.35X coupler   FOV (µm) with 0.5X coupler  
1/3" camera 2/3" camera 1/3" camera 2/3" camera
2.5X  0.08  10.7  22  3.60  4.20  5364 x 4024  9394 x 7044  3788 x 2840  6614 x 4960 
5X  0.15  20.0  5.9  1.80  2.20  2682 x 2012  4697 x 3522  1894 x 1420  3307 x 2480 
10X  0.30  11.0 1.5  0.90  1.10  1335 x 1000  2327 x 1745  944 x 708  1644 x 1233 
20X  0.45  3.1  0.5  0.45  0.75  668 x 500  1169 x 877  468 x 351  822 x 616 
50X  0.8  1.0  0.1  0.18  0.42  267 x 200  466 x 349  189 x 142  328 x 246 
100X  0.9 1.0 0.013 0.09  0.37  133 x 100  234 x 175  93 x 70  164 x 123 
150X  0.9  1.0  0.013  0.06  0.37  88 x 66  156 x 116  62 x 46  109 x 82