Phenom ProX with ProSuite Phenom ProX with ProSuite and Elemental Analysis EID Selected Area Mapping Elemental Mapping with Phenom ProX EDS software Phenom ProX with Elemental Mapping software Phenom ProX Desktop SEM with Prosuite and Elemental Mapping HR Phenom ProX Phenom ProX Desktop SEM
/files/1613/7669/3778/The_Phenom_Pro_X_All_in_One_Desktop_SEM_-_Phenom_World_-_Pittcon_2013.mp4/files/3413/7669/3477/The_Phenom_Pro_X_All_in_One_Desktop_SEM_Phenom_Wor.webmPittcon AzoNano Phenom IntroductionEmile Asselbergs introduces the Phenom ProX with EDS
/files/4313/7669/2786/Movie_Phenom_proX.mp4/files/8813/7669/2906/Movie_Phenom_proX.webmThe Phenom ProX - SEM imaging and elemental analysis
/files/1213/7669/2456/Elemental_Mapping.mp4/files/9813/7669/2529/Elemental_Mapping.webmElemental Mapping with the Phenom ProXElemental Mapping with the Phenom ProX
|Overview||Features||Options & Accessories||Gallery||Specifications|
New: Phenom EDS Webinar: October 31st! read more...
The Phenom ProX desktop scanning electron microscope is the ultimate all-in-one imaging and X-ray analysis system. Sample structures can be physically examined and their elemental composition determined. Viewing three-dimensional images of microscopic structures only solves half the problem when analyzing samples. It is often necessary to collect more than optical data to be able to identify the different elements in a specimen. This is accomplished in the Phenom proX with a fully integrated and specifically designed EDS detector. EDS is a technique that analyzes X-rays generated by the bombardment of the sample by an electron beam. EDS elemental analysis is fully embedded into the Phenom proX system. X-ray detector and control software are combined in one package. This Elemental Identification (EID) software package allows the user to program multiple point analysis, and identify any hidden elements within the sample. Additionally, this software can be expanded with elemental mapping functionality. The step-by-step guided process within the EID software helps the user to collect all X-ray results in an organized and structured way.
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- < 30 seconds from load to SEM image
- 80 - 100,000x SEM magnification
- Better than 17 nm SEM resolution
- Color optical imaging and navigation systems
- Motor driven focus
- 6-lens system for distortion free optical images
- Telecentric opics
- Neverlost navigation uses optical image to navigate during SEM imaging
- Camera and automated, x-y motorized stage integrate to allow easy sample positioning and location by simply clicking or touching the optical image of the sample
- High performance, trouble free electron source
- 1,500+ hr life source (CeB6 - Cerium Hexaboride)
- No cleanings required between source changes
- High brightness – 10x brighter than tungsten
- Integrated EDS analysis
- Software and detector developed by Phenom World
- Optional elemental mapping and linescan software
- Elemental detection range: C- Am
- 5kV, 10kV, and 15kV accelerating voltage options
- Electron beam current selection for tuning imaging settings or high throughput analysis
- Touch screen operation for auto adjuments, offsetting and moving the sample using optical and SEM images
- Rotary knob makes focus and zoom easy and intuitive
Charge Reduction Sample Holder
Is designed to reduce sample charging. This sample holder eliminates extra sample preparation of non conductive samples. Imaging samples like paper, polymers, organic materials, ceramics, glass and coatings becomes fast and trouble free.
Metallurgical Sample Holder
The base of this holder is equal to the Standard Sample Holder, except that this holder is designed to support resin mounted samples (schlieffen). For metallurgy and working with inserts this holder is the preferred solution.
Metallurgical Charge Reduction Sample Holder
This sample holder eliminates extra sample preparation of non conductive resin mounted samples. This way imaging samples becomes fast and trouble free.
Micro Tool and Tilt-Rotation Sample Holder
Imaging long axial shaped samples without sample modification is now possible. Imaging objects such as drill bits, milling tools and injection needles is fast and easy using the Micro Tool and Tilt-Rotation Sample Holder. Imaging coatings and cutting angles is possible by rotating and tilting the region of interest without unloading the sample from the holder.
The inserts below are used in combination with the Metallurgical Sample Holder or Metallurgical Charge Reduction Sample Holder:
Cross section imaging of coatings and multilayer samples becomes fast and easy with this metallurgical insert. Its smart split clamping mechanism eliminates the need for screws and tools to clamp the sample.
The micro-electronics insert is designed to image for semiconductor, micro-electronics or solar cells. Its unique clamping mechanism enables loading without adhesives or surface contact.
Temperature Controlled Sample Holder
The Temperature Controlled Sample Holder has been developed by Phenom-World and Deben in order to study vacuum-sensitive and vulnerable samples such as biological, food or organic coatings. The Temperature Controlled Sample Holder is able to control the temperature of the sample and therefore influence the humidity around the sample. This minimizes the effect of the electron beam and vacuum damage of the samples. This active sample holder is based on the Peltier principle and designed in a way that the temperature can be adjusted quickly and easily. The sample temperature is accurately monitored and controlled by a dedicated keypad controller. The temperature of the Temperature Controlled Sample Holder can be controlled from -25°C to +50°C, with an accuracy of ±1.5°C.
- Temperature range -25°C to +50°C
- Temperature accuracy ±1.5°C
- Temperature display resolution 0.1°C
- Maximum cooling rate 20°C/min
- Sample size up to 25mm diameter and 5mm height
Motorized Tilt Rotation Sample Holder
Revealing the hidden treasures of all features on your sample is now possible with the Motorized Tilt & Rotation Sample Holder. Samples can have lines and holes, or have multi-layer structures. The new Motorized Tilt & Rotation Sample Holder allows analysis of the sample from all visible sides and enables a unique 3D image of your sample. The Motorized Tilt & Rotation Sample holder is a so-called smart sample holder that does not have any cables attached. The sample holder interface board automatically identifies the sample holder type and will directly transfer tasks to the holder.
- Tilt range -10° to +45°
- Continuous 360° compucentric rotation
- Controlled by dedicated Motion Control Pro Suite application
- Tilt adapted focus
- Align X and Y
Additional software options available include:
- 3D reconstruction and roughness analysis
- Fibermetrics fiber analysis
- PPI programming interface
ELEMENTAL MAPPING & LINE SCAN
The mapping function is an option within the EID software package. Elemental mapping reveals the distribution of elements within the sample. Here the previously selected elements for the spot analysis can be mapped at a user-specified pixel resolution and acquisition time. The real-time mapping algorithm shows live build-up of the selected element maps while storing spectra of each pixel. This allows elements to be added or removed at any time during or after the mapping process.
Mapping can be done on the image as a whole, but there is an additional benefit included to save time by adding the Selected Area option. Line Scan allows analysis over a selected line. The key lies in the possibility to select each of the following: number of points, dwell time per point and number of passes. On top of that, the results can be easily exported and reported via an automated template.
- Magnification range 20 - 100,000x
- Intuitive user interface, maximum employability
- Images up to 2048 x 2048 pixels
- Sample loading in less than 30 seconds
- Very low energy consumption
|Light Optical||Magnification fixed: 20 - 120x|
|Electron Optical||Magnification range: 80 - 100,000x|
|Digital zoom: max. 12x|
|Element detection range:||C – Am|
|Light Optical||Selectable axial and off-axis LEDs|
|Electron Optical||Long-lifetime thermionic source|
|Accelleration Voltage||5 - 15 kV|
|Resolution||Better than 17 nm|
|Image Format||JPEG, TIFF, BMP|
|Image Resolution Options||456 x 456, 684 x 684, 1024 x 1024 and 2048 x 2048 pixels|
|Pixel Resolution||7.8 nm|
|Imaging Module||286 (w) x 566 (d) x 495 (h) mm, 50 kg|
|Diaphragm Vacuum Pump||145 (w) x 220 (d) x 213 (h) mm, 4.5 kg|
|Power Supply||156 (w) x 300 (d) x 74 (h) mm, 3 kg|
|Monitor||375 (w) x 203 (d) x 395 (h) mm, 4.6 kg|
|Ambient Temperature||15°C ~ 30°C (59°F ~ 86°F)|
|Humidity||< 80 % RH|
|Power||Single-phase AC 110 - 240 Volt, 50/60 Hz, 300 W (max.)|
|Recommended Table Size||120 x 75 cm, load rating of 100 kg|