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Zeta Systems
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- Zeta 20
- Zeta 200 Automated
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Back to 
All Products
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5x |
10x |
20x |
50x |
100x |
| Z resolution (µm) |
5.90 |
1.50 |
0.50 |
0.10 |
0.07 |
| N.A. |
0.15 |
0.30 |
0.45 |
0.80 |
0.90 |
| XY Travel ( µm) |
200 mm |
| Z Travel |
30 mm |
| Accuracy |
± 2.5%* |
| Repeatability |
Better than 1.5% (1σ/Mean)* |
| Camera Res |
1024x768, 1366x768 option |
| Zeta 280 Additional Features |
| Automation Features |
2" - 4" Wafer cassette to cassette; multisite/ recipe sequences; supports industry-standard form factors |
* Static repeatability/ accuracy based on LVSI 1.8 µm step height standards, 100x/ 0.9 NA objective. All spedifications subject to change without notice
 
Typical Microscope Sub-system:
Light Source: High Brightness white LED
Objectives: 5x, 10x, 20x, 50x, 100x
Coupling Lens: 0.5x
Manual Stage:100mm x 100mm XY travel
Z-Stage: 30mm total vertical travel
Camera:1024 x 768, 1/3" CCD |
Dimensions (mm)
Microscope: 305 x 406 x 559
Computer: 381 x 457 x 102
Monitor: 559 x 406 x 127
Total Weight 65 lbs / 29.5 kg |
Operating Specifications
Voltage: 100 - 230 VAC
Current: 2A
Operating Temp: 18 - 30° C, non-condensing, ±1 C° per hour
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