Zeta Systems

• Zeta 20
  • Features
  • Video
  • Specifications
• Zeta 200 Automated
  • Features
  • Specifications

The Zeta-20
Features

• Low Cost
• Easy to use
• True color 3D imaging
• Sub-micron metrology
• High roughness and low reflectivity samples
• Deep channels and high aspect ratio features
• Versatile application software

Imaging

• True color information
• Real 3 dimensional data

Precise Dimensions

• Accurate dimensions: lateral sizes, step heights, and wall angles - all in a single scan

Metrology

• Both 2D and 3D roughness parameters are calculated from millions of data points.
• Provides superior data compared to single line scans from other profilers

Film Thickness

• Single or multi layers film thickness  can be measured with the spectrometer option.  Now you can simultaneously investigate the surface topography AND the films that make up the surface.