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Zeta Systems
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- Zeta 20
- Zeta 200 Automated
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Zeta metrology systems have the unique capability to combine multiple measurement functions into a single tool. Our Solar TRIPLE PLAY configuration targets solar cell characterization by providing three key measurements in one high-value tool package. |
| Texture Characterization - Our optical profiling capability permits the rapid analysis of textured surfaces. 3D visualization delivers a qualitative view of the surface, while feature size histograms, linear and areal roughness calculations provide quantitative data on base or acid etched surface textures. |
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Finger Contact Profiling - Imaging solar finger metal contacts is difficult because of the vast difference in reflectivity between the AR-coated texture and the metal contact. The textured area can have a reflectivity of 0.5% or less while the metal reflectivity can be over 90%.
Zeta solar application software includes anti-halation algorithms that compensate for the huge difference in surface brightness to generate clear 3D images of the contact on the texture while also delivering accurate step height and profile data. |
| Film Thickness Measurement - Zeta Triple Play systems include a photo-spectrometer that can measure thicknesses of thin films deposited on textured surfaces that are difficult to measure using traditional ellipsometric techniques. Ellipsometers work very well on thin films deposited on smooth surfaces, but have problems getting accurate readings on films deposited on rough, textured surfaces.
Not only can the Zeta Film Thickness option measure thin films on textured surfaces, but it is elegantly integrated into the same microscope system used for texture and finger measurement removing the need for a separate tool. The Zeta Film Thickness option also includes over 200 libraries of n and k values for various thin films including Silicon Nitride, Silicon Dioxide, Aluminum Oxide, Gallium Nitride and many others. |
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