Zeta Systems

• Zeta 20
  • Features
  • Video
  • Specifications
• Zeta 200 Automated
  • Features
  • Specifications

Transparent Thin Film Measurement
White light spectral reflectometer

All Zeta systems can be ordered with a thin film spectral photometer that measures the reflectance characteristics of the surface. Advanced curve fitting and iterative solving algorithms in the Zeta 3D software match the reflectance curve with calculated values from known n and k values to determine the thickness of various layers.

The system can handle multi-film stacks and can also reverse calculate a material's n value if its thickness is known.

Our film thickness measurement system comes with over 200 thin film material libraries that include materials such as Silicon Nitride, Silicon Dioxide, Aluminum Oxide, Gallium Nitride and many more.

• Measure films thicker than 30 nanometers and up to 10 microns in thickness
• Spectral range : 430nm – 750nm
• Spectral resolution : 1nm
• Built-in library of n and k values for over 200 materials
• Can predict n and k values if thickness is known
• Works well on films over rough surfaces such as nitride on textured Si solar cell
• True color images also provide valuable information of the region being measured

Nomarski/QDIC Phase Contrast Imaging

For low contrast or very small features, Zeta systems can be factory-fitted with Nomarski prisms that allow the system to resolve nanometer-scale features.

In addition, QDIC imaging can also image transparent samples where different surfaces have very little contrast between them and are difficult for other systems to easily discern.

For those that may need QDIC in the future, but have a limited immediate budget, we can offer "Nomarski-ready" systems. This option includes basic components that require factory installation, but not the QDIC system to save cost. The remainder of the QDIC hardware can then be ordered later and installed in the field.

• Enables imaging of very fine roughness and texture
• Proprietary Zeta 3D software converts images to
  calibrated, quantitative surface roughness data
• Detect and quantify depth on sub-micron features
• Zeta tools can be ordered ‘Nomarski ready’ for future
  field upgrade option
• Extends working range of the Zeta microscope down into the 0 – 20nm range

Multi-FOV Image Stitching

To obtain a wide field of view with high magnification, the Zeta 3D software has an Image Stitching option that allows a user to join multiple images into a single large 3D image.

Our system software can support composite stitched images as large as 8 FOV by 7 FOV giving an effective total FOV of 2008um x 1323um at 100x magnification using a 0.35x lens coupler.

Zeta 20 Engineering Base Plate (Standard):

12" x 9" with 1/4-20 holes, 1 inch grid enables a wide variety of mounting options

Manual Stage:

100 mm x 100 mm XY travel for multi-purpose use

Tilt Stage:

+/- 60 degree tilt for large morphology

Automatic Objective Sensor:

Automatically detects and records the magnification and field of view (FOV) when changing objectives. Eliminates user error during data acquisition.