Nanoscience Instruments

Zeta 3D Microscope
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Zeta Systems

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Simply Zeta 3D Measurement Software

Live Video Imaging

Rapid Data Capture

Stitch multiple images together

3D surface visualization

  • Tilt, Rotation, Zoom, Filtering,
  • Feature volume calculation

2D surface analysis

  • Feature Size, Diameter, Area
  • Pattern pitch, standard deviation
  • Areal roughness
  • Sub-micron metrology
  • Box height (areal avg step height)

Profilometry

  • Step Height
  • Roughness parameters
  • Multiple cross-sections
  • Averaging measurement cursors
  • Point-to-point measurement markers
  • Slope & waviness compensation

Roughness with Zeta 20
Roughness measurements

Zeta 20 Step Height measurements
Step Height measurement

Stitching Large Images
Stitching of large images

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Flexible and Simple software layout
Cross section window.  Can contain multiple traces depending on the number of cross sections drawn by the user.  Has measurement cursors and markers to allow step height, wall angle and roughness calculations. 2D (top) view of the substrate.  Can be used to draw cross sections and measure feature dimensions
Zeta Analysis
Data log.  Contains step height, wall angle and roughness information calculated from the cross sectional traces.  Can be exported as ‘*.csv’ file. 3D view of the substrate
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