3D Profiler & Atomic Force Microscope
Combines 3D optical microscopy with AFM in one package

The unique combination of atomic force microscopy and optical profilometry provides a system capable of imaging nanometers to millimeters. By combining the compatct Nanosurf LensAFM with the Zeta Instruments optical profiler, you get an extremely wide range of metrology capabilities.

The LensAFM is designed to mount directly onto the Zeta microscope system, providing full optical access through the instrument and a clear view of the AFM cantilever positioned on the sample.  By mounting to the microscope’s turret, the user can quickly change from true color 3D optical measurements to high resolution AFM imaging.  The AFM extends the capabilities of the Zeta microscope system by providing nm lateral resolution and sub-nm height resolution which is not possible by optical techniques alone.

The Zeta-20 is a fully integrated optical profiler that provides 3D imaging and metrology capability in a robust and cost effective package. Based on the proprietary ZDot™ technology, the Zeta-20 can image surface features with small geometries such as roughness on textured wafers.  The unique optical design enables inspection of transparent substrates as well as thin films. A broadband, compact dual LED light source enables true color imaging. It is capable of imaging large steps, high roughness, deep channels, and other high aspect ratio features.