Lithography in a Box
Microfabrication with No Cleanroom Required!
Spin coating for lithography in a box too simulator from UM
This is a benchtop method that demonstrates concepts for microfabrication and photolithography and does not require a clean room.
This approach allows students to simulate the fabrication of microelectronic devices using simple tools and procedures. Using this lab, students start with bare silicon wafers and produce working microelectronic devices such as a p-n diode, a solar cell, and a MOSFET transistor.
Schools reproduce the kits for use in their classroom. This is a module for high school and up.
Dr. Marti would like to connect with teachers to trial this activity:
James Marti, Minnesota Nano Center, University of Minnesota, Minneapolis