AFM Cantilevers and Chips

AFM Chip showing cantilever and probe tip

AFM cantilever and chip schematics representing approximate values for most of the standard silicon AFM probes available from Nanoscience Instruments.

Our AFM chips fit most commercial Atomic Force Microscopes (AFMs) as they are industry-standard size. They are compatible with AFMs from Nanosurf, DI/Veeco, Agilent/Molecular Imaging, Asylum Research, JEOL, and others.

Made of micromachined, monolithic Si, they exhibit excellent uniformity and provide high quality imaging. AppNano and Vistaprobes cantilevers are defined using wet anisotropic processes. As a result, the cantilever cross-section is trapezoidal. A dry etch process is used to define the Aspire and Team Nanotec probes, resulting in cantilevers with a rectangular cross-section. The backside width of our cantilevers has been chosen to be between 35 to 45 µm . This makes the cantilever suitable for all commercially available AFMs. The wide backside of the cantilever also helps reflecting laser completely for large SUM signal and eliminates laser falling and reflecting back from the sample surface. The cantilever thickness and length are varied to suit the requirements of various SPM applications. The tip is set at the far end of the free end is consistently controlled between 15 to 25 µm for easy and predictable alignment of the tip and the sample.

The chip (substrate) dimensions are 3400 µm x 1600 µm x 300 µm (length x width x thickness). The design fits into most commercially available SPMs.

AFM cantilever width AFM cantilever side view AFM cantilevers are specified by their width, length, and thickness. These parameters determine important factors like resonance frequency and spring constant.


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