Modular CL in-SEM system with multiple imaging modes


Delmic SPARC

Product Image of the Delimc Sparc Cathodoluminescence System

The SPARC is a high-performance cathodoluminescence (CL) detection system. The system is ideal for the optimal collection and detection of cathodoluminescence emission, enabling fast and sensitive material characterization at the nanoscale. With a modular platform design and open source software, the Delmic SPARC is an upgradable CL system well suited for nanophotonics and geology research.

The Logo of Delmic


The SPARC offers:

  • Seamless integration with your SEM: Compatible with all major brands
  • Multiple modes for expanded capability including: Hyperspectral, Angular, and Polarization
  • High collection efficiency and photon yield: Able to study low light emitting samples, including metals, semiconductors, and nanophotonics
  • Fully retractable automated mirror stage: Minimum interference with other SEM detectors
  • Removable: Mirror stage easily removed from and returned to SEM chamber
Delmic SPARC for Cathodoluminescence

SPARC for integrated Cathodoluminescence

Delmic SPARC for CL with collection (left) and detection (right) of emitted cathode radiation.

Fully Retractable Mirror Stage

The high precision mirror staging is designed for ease of use with minimal interference. The stage has micropositioning capability, providing:

  • Automated alignment using accurate and reproducible micropositioning
  • Minimum interference with other SEM techniques
  • High collection efficiency due to enhanced reflectivity with unprecedented sensitivity for faster measurements with reduced artifacts
  • Ease of use as the mirror is removable and may easily be cleaned

The automated mirror stage allows for highly efficient hyperspectral imaging in addition to other advanced imaging modes.

Modular and Upgradable

The SPARC system has a modular design and is upgradable. Optical plates, filters, polarizers, and other components can be customized for a variety of applications.

Integrated Calibrated Light Source

The Delmic SPARC utilizes an integrated light source for automated calibration of spectrograph with CL system.



The SPARC CL was designed for ease of use. In addition to the automated alignment, fully retractable mirror and calibrated light source, the software user interface allows for straightforward data acquisition and analysis. For example, when using Polarization mode imaging, the raw Fourier image is directly displayed as a polar plot.

Software features include:

  • Simultaneous acquisition of the SEM with either spectral or angle-resolved images
  • Select grid and pixel size for CL images
  • Apply correction files with a single click
  • Open source
  • Widget plugins available

Spectral Mode Imaging

Spectral imaging is the traditional and most common technique for cathodoluminescence measurements. A spectral image is created when a scanning electron microscope (SEM) rasters the electron beam across a sample, detecting light over a single or narrow range of wavelengths. A hyperspectral image is created when the radiation is detected over a range of distinguishable wavelengths, shown schematically:

Schematic of hyperspectral imaging with the Delmic SPARC cathodoluminescence (CL) system

Angular Mode Imaging

Angle-resolved CL spectroscopy projects the image from the mirror to a camera. By detecting the directionality of the emitted light, also referred to as momentum spectroscopy, angle-resolved CL images are collected. A filter wheel is used to spectrally distinguish the emission wavelengths.

Applications for angle-resolved cathodoluminescence imaging include plasmonic nanoantennas and photonic crystals.

Polarization Mode Imaging

Using a polarizer or polarimeter in the angle-resolved mode allows for the reconstruction of the polarization state (Stokes vector) of cathodoluminescence for different emission angles. An advanced correction for the optical system including the paraboloid mirror is required for this reconstruction and is provided with the polarization mode option.