Nanomechanical Characterization

Multi-directional mechanical testers for the nano to milli-Newton force range

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FT-MPS02 MEMS Probestation

Product Image of the Femto Tools FT-MPS02

The FT-MPS02 MEMS Probestation is a wafer-level MEMS testing instrument that allows for the fast, user-friendly and simultaneous testing of mechanical, electrical and geometrical properties on MEMS chips.

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Features

The FT-MPS02 MEMS Probestation combines a micromechanical testing module with a manual probestation, a motorized dual measurement microscope, programmable voltage/current sources and a multimeter. Besides the capabilities of each of the four individual modules, the FT-MPS02 MEMS Probestation also features a wide range of additional capabilities that result from the combination and synchronization of the modules in one measurement system, such as the combined electro-mechanical testing.

The FT-MPS02 MEMS Probestation greatly improves the efficiency of MEMS development. It allows for the quantitative characterization of the micromanufacturing process steps and provides feedback to improve the mathematical models used to design MEMS. Furthermore, it enables the mechanical testing of MEMS prototypes directly on the wafer without the need of wafer dicing and wire-bonding.

Wafer-level electro mechanical testing

Mechanical Testing Module

The mechanical measurement module is a force-probe based testing system for vertical (out-of-plane) and horizontal (in the wafer plane) micromechanical measurements. The module includes a three-axis piezoelectric nanopositioning platform. Optical position encoders enable the closed-loop, high precision force application using a FT-S Microforce Sensing Probe or a FT-S-LAT Lateral Force Sensing Probe.

The FT-MPS02 features two integrated digital microscopes. One is a topview motorized zoom microscope with coaxial, through-the-lens illumination and one is a sideview microscope (Scheimpflug configuration) with backlight illumination. This enables a precise sensor-to-sample alignment.

Dual Microscopes in the FT-MPS02

Probe Station with Electrical Sources and Meters

The base of the MPS-02 is a manual probe station for wafers up to 200mm (8″). There are two vertically adjustable tables for the mounting of electrical probes. For low-frequency electrical measurements, the FT-MPS02 features a variety of programmable power sources and meters. This enables for the combined electro-mechanical testing of unpackaged MEMS chips and wafers.


Accessories

FT-S Microforce Sensing Probe

FT-S Microforce Sensing Probe

The FemtoTools FT-S Microforce Sensing Probes are microforce sensors capable of measuring forces from 100 millinewtons (0.1 N) down to several nanonewtons (10-9 N) along the sensor’s probe axis. Both compression and tension forces can be measured. The individual calibration in combination with an outstanding long-term stability and low signal drift guarantees significantly higher measurement accuracy than any other force sensing system in this force range.

Sensor Tip Options

  • Flat silicon tip with a tip size of 50 µm by 50 µm
  • Pointy tungsten probe tip with a tip radius smaller than 2 µm
  • Spherical glass tip with a point radius of 25 µm
  • Spherical ruby tip with a point radius of 125 µm
Sensor

FT-S100

FT-S1000

FT-S10000

FT-S100000

Force Range ±100µN ±1’000µN ±10’000µN ±100’000µN
Sensitivity 50µN/V 500µN/V 5000µN/V 50000µN/V
Resolution @10Hz 0.005 µN 0.05 µN 0.5 µN 5 µN
Min. Order Quantity 5 5 5 5
FT-S-Lat Lateral Microforce Sensing Probe

FT-S-LAT Lateral Microforce Sensing Probe

The FemtoTools FT-S-LAT Lateral Microforce Sensing Probe is a microforce sensor capable of measuring forces from one millinewton (10-3 N) down to several nanonewtons (10-9 N) perpendicular to the sensor’s axis. Both compression and tension forces can be measured.

Off-axis measuring capability allows for the vertical micromechanical testing while observing both the sensing-probe tip and the sample under a top-view microscope. The individual calibration in combination with an outstanding long-term stability of the FT-S-LAT Lateral Microforce Sensing Probes guarantees significantly higher measurement accuracy than any other force sensing system in this force range.

Sensor Tip Options

  • Pointy tungsten probe tip with a tip radius smaller than 2 µm
  • Spherical glass tip with a point radius of 25 µm
  • Spherical ruby tip with a point radius of 125 µm
Sensor

FT-S1000-LAT

Force Range ±1’000µN
Sensitivity 500µN/V
Resolution @10Hz 0.05 µN
Min. Order Quantity 5