Optical Profilometers

Obtain surface morphologies, step heights and surface roughness with a precision focusing pattern or white light.

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MicroXAM-800

Image of the MicroXAM-800 White Light Interferometer

The MicroXAM-800 white light interferometer features a powerful suite of functions and differentiates itself with a highly customizable and scriptable user interface.

  • SMART acquire algorithms to simplify measurement setup
  • Flexible script setup with drag and drop off functions
  • Highly precise 3D step height, roughness, and defect measurements

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Features

Schematic of White Light Interferometry Technology

The MicroXAM-800 interferometer from KLA Tencor is a flexible platform for both acquiring and analyzing data. The MicroXAM-800 white light interferometer includes the hardware and software features necessary to meet stringent R&D and production environment requirements. The MicroXAM-800 features include programmable stages, customizable recipe set-up, scripting, and an expandable library of analysis tools. A variety of objectives, sample stages, and options are available to meet the needs of various applications.

The MicroXAM-800 supports applications involving highly precise step height measurements, R&D, production, and surface roughness analysis. It is used in a variety of industries including LED, power devices, medical devices, MEMS, semiconductor, solar, and precision surfaces.


Software