Optical Profilometry is a technique used to extract topographical data from a surface. The purposes of profilometry are to obtain surface morphologies, step heights and surface roughness. These tasks can be accomplished by using a physical probe (stylus) or by using light. Nanoscience Instruments offers two different profilometers which use the light based approach: a structured grid confocal microscope and a white light interferometer.
The Zeta-20 structured grid confocal optical profiler from Zeta Instruments is a true color, 3D, non-contact surface profiler with multi-mode optics technology.
The MircroXAM-800 white light interferometer from KLA-Tencor is a 3D, non-contact, surface profiler with high-precision 3D metrology.
Zeta 3D optical profiler image of patterned sapphire substrate (PSS)
Core technology of Zeta 3D systems
Features and Benefits of the MicroXAM-800 White Light Interferometer
White light Interferometer with a interactive user interface and a powerful suite of functions to support the broadest range of applications.