Optical Profilometry is a technique used to extract topographical data from a surface. The purposes of profilometry are to obtain surface morphologies, step heights and surface roughness. These tasks can be accomplished by using a physical probe (stylus) or by using light. Nanoscience Instruments offers two different profilometers which use the light based approach: a structured grid confocal microscope and a white light interferometer.
The Zeta-20 structured grid confocal optical profiler from Zeta Instruments is a true color, 3D, non-contact surface profiler with multi-mode optics technology.
The MircroXAM-800 white light interferometer from KLA-Tencor is a 3D, non-contact, surface profiler with high-precision 3D metrology.
Zeta 3D optical profiler image of patterned sapphire substrate (PSS)
Core technology of Zeta 3D systems
3D Optical Profiler on your benchtop
Features and Benefits of the MicroXAM-800 White Light Interferometer
White light Interferometer with a interactive user interface and a powerful suite of functions to support the broadest range of applications.