MicroXAM-800 White Light Optical Interferometer

The MicroXAM-800 is a white light interferometer from KLA-Tencor’s surface metrology product line. This tool uses white light interferometry and differentiates itself with a highly customizable and scriptable user interface. The MicroXAM-800 interferometer features a powerful suite of functions to support the broadest range of applications.

  • SMART acquire algorithms to simplify measurement setup
  • Flexible script setup with drag and drop off functions
  • Highly precise 3D step height, roughness, and defect measurements



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