Why Zeta

The Zeta 20 optical profiler system includes:

  • True color imaging
  • Superior HBLED light source
  • Universal stage mount 
  • Modular software interface
  • Patented ZDot technology

The Zeta 3D optical metrology platform combines three elements:

  1. Patented ZDot optics yield 3D true color imaging
  2. Optical and mechanical core
  3. Proprietary software with advanced measurement and analysis capabilities


ZETA Instruments Nanoscience Instruments is proud to partner with Zeta Instruments, providing 3D Optical Profilers, driven by rapid technology progress combined with a strong focus on customer requirements.


3D Imaging Using Proprietary ZDot Focusing Technology

ZDot logo

Surfaces are detected by combining an innovative optical design with a precision focusing pattern (ZDots). The ZDot focusing technology eliminates the complicated optics along with the laser and raster design employed by confocal microscopes. The result is a true color 3D image profile. Unlike a confocal microscope, there is no need for periodic system maintenance or  laser alignment.  Even samples with low reflectivity or highly mixed reflectivites can be imaged by using ZETA’s high dynamic range imaging technology.

3D images are reconstructed using the ZDot technology by focusing on different sample planes as shown in the pictures below. On the left is a 3D image created from focal planes obtained from the top and bottom surfaces. 

ZDot 3D image with focal planes

Using ZDot technology, the multi-surface software feature can characterize up to 2 optically transparent layers on a substrate. Interfacial roughness measurements are quickly obtained using known refractive indices of materials.

Watch a 7 minute microfluidics application video demonstrating the technique.

The Zeta-20 comes with a variety of software options includingreflectometry and interferometry optical modes. The software is also customizable for application specific data acquisition.

Optional accessories include a motorized turret, automatic defect inspection software (AOI), an edge inspection fixture, a piezoelectric z-mechanism, and a diamond scribe marker. A motorized XY stage is optional for the Zeta-20. Many of these accessories provide automation features for the Zeta-20. These 3D optical profilers are compatible with Olympus lenses and with digital cameras.

Optical Metrology Modes
Optical Metrology Modes

Optional modes for high Z resolution and thin film measurements

3D Automation and Options
3D Automation and Options

Automated inspection, image stitching, motorized stages or turrets, lighting options


Request more information: 



Captcha Code

Click the image to see another captcha.