Optical Metrology Modes
These modes combine hardware and software options for a variety of applications, including measuring film thickness, surface roughness, and step heights down to the Angstrom scale. In contrast to traditional optical instrumentation, a wide variety of surfaces can be measured using one Zeta system:
- Low reflectance
- High reflectance
- High roughness from mm to nm
ZDot focusing technology, described in Why Zeta, is standard on all optical metrology tools. These options provide further customization for your system.