Thin Film Reflectometry

ZFT Mode to Measure Film Thickness with Reflectometry

Spectroscopic reflectometry measures film thickness for optically transparent films on a substrate. All instruments in our product platform utilize a superior light source to conventional reflectometers, allowing characterization of materials with low reflectivity.

Reflectance data using ZFT mode with the Zeta 3D optical profiler for film thickness of silicon nitride on silicon dioxide on a Si wafer