Scanning Electron Microscopes

The fastest desktop electron microscopes for high-quality imaging and analysis.

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Compare Desktop Phenom SEMs

Standalone image of the Phenom Pharos SEMStandalone image of the Phenom XL SEMStandalone image of the Phenom ProX SEMStandalone image of the Phenom Pure SEM
Model

Phenom Pharos

Phenom XL

Phenom Pro/ProX

Phenom Pure

Electron SourceField Emission Gun (FEG)CeB6 crystalCeB6 crystalCeB6 crystal
Optical Navigation Camera Magnification20x to 135x3x to 16x20x to 135x20x (fixed)
Max. SEM Magnification1,000,000x200,000x350,000x175,000x
SEM Resolution – BSD4 nm10 nm8 nm15 nm
SEM Resolution – SED (optional)2.5 nm10 nm6 nm15 nm
Acceleration Voltages2 – 15 kV4.8 – 20.5 kV4.8 – 20.5 kV5 kV and 10 kV
Vacuum OptionsHigh, medium, and low vacuum (software selectable)High, medium, and low vacuum (software selectable)High and low vacuum sample holdersHigh and low vacuum sample holders
DetectorBSD
SED (optional)
EDS (optional)
BSD
SED (optional)
EDS (optional)
BSD
SED (optional)
EDS (optional)
BSD
SED (optional)
EDS (optional)
Sample HandlingSingle pin stub
25 mm diameter
Up to 36 pin stubs
100 mm x 100 mm
 Single pin stub
25 mm diameter
 Single pin stub
25 mm diameter
Learn MoreView PharosView XLView Pro / ProXView Pure

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