Scanning Electron Microscopes

The fastest desktop electron microscopes for high-quality imaging and analysis.

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Compare Desktop Phenom SEMs

Model

Phenom Pharos

Phenom XL

Phenom Pro/ProX

Phenom Pure

  Standalone image of the Phenom Pharos SEM Standalone image of the Phenom XL SEM Standalone image of the Phenom ProX SEM Standalone image of the Phenom Pure SEM
Source Field Emission Gun (FEG) Ultra high brightness, long life CeB6 crystal source Ultra high brightness, long life CeB6 crystal source Ultra high brightness, long life CeB6 crystal source
Optical navigation camera 20 – 135x; color image 3-16x; color image 20-135x; color image  Fixed 20x; black & white image
SEM magnification Max. 1,000,000x Max. 100,000x Max. 150,000x  Max. 65,000x
Resolution < 4 nm (BSD)
< 3 nm (SED)
< 10 nm (BSD & SED) < 10 nm (BSD)
< 8 nm (SED)
 < 25 nm (BSD & SED)
Digital zoom Max. 12x Max. 12x Max. 12x Max. 12x
Acceleration voltages 2 – 15 kV 5 – 20 kV 5 – 15 kV 5 – 10 kV
Vacuum options High, medium, and low vacuum (software selectable) High, medium, and low vacuum (software selectable) High and low vacuum sample holders High and low vacuum sample holders
Detector BSD
SED (optional)
EDS (optional)
BSD
SED (optional)
EDS (optional)
BSD
SED (optional)
EDS (optional)
BSD
SED (optional)
EDS (optional)
Sample size Max. 25 mm diameter
Single stub
Max. 100 mm x 100 mm
Up to 36 pin stubs
Max. 32 mm diameter
Single stub
Max. 32 mm diameter
Single stub
Sample height Max. 100 mm Max. 65 mm Max. 100 mm Max. 100 mm
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