 |
 |
 |
|
|
| Model |
Phenom Pharos |
Phenom XL |
Phenom Pro/ProX |
Phenom Pure |
|---|---|---|---|---|
| Electron Source | Field Emission Gun (FEG) | CeB6 crystal | CeB6 crystal | CeB6 crystal |
| Optical Navigation Camera Magnification | 20x to 135x | 3x to 16x | 20x to 135x | 20x (fixed) |
| Max. SEM Magnification | 1,000,000x | 200,000x | 350,000x | 175,000x |
| SEM Resolution – BSD | 4 nm | 10 nm | 8 nm | 15 nm |
| SEM Resolution – SED (optional) | 2.5 nm | 10 nm | 6 nm | 15 nm |
| Acceleration Voltages | 2 – 15 kV | 4.8 – 20.5 kV | 4.8 – 20.5 kV | 5 kV and 10 kV |
| Vacuum Options | High, medium, and low vacuum (software selectable) | High, medium, and low vacuum (software selectable) | High and low vacuum sample holders | High and low vacuum sample holders |
| Detector | BSD SED (optional) EDS (optional) |
BSD SED (optional) EDS (optional) |
BSD SED (optional) EDS (optional) |
BSD SED (optional) EDS (optional) |
| Sample Handling | Single pin stub 25 mm diameter |
Up to 36 pin stubs 100 mm x 100 mm |
Single pin stub 25 mm diameter |
Single pin stub 25 mm diameter |
| Learn More | View Pharos | View XL | View Pro / ProX | View Pure |