Desktop SEM Models

Meteorite EDS Map

Lily Pollen

Integrated Circuit EDS Map

Tin Spheres

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Product Image of the Phenom XL tabletop SEM

Phenom XL

The largest sample chamber on a desktop platform – our most popular model

Product image of the Phenom ProX benchtop SEM

Phenom Pro / ProX

All-in-one system for high resolution imaging and EDS

Image of the Phenom Pharos desktop SEM with FEG source

Phenom Pharos

Achieve ultimate resolution with the world’s only desktop field emission SEM (FE-SEM)

Product Image of the Phenom XL tabletop SEM with ParticleX Software

Phenom ParticleX

Fully automated particle analysis with customized packages for technical cleanliness, additive manufacturing, or steel inclusions

Product Image of the Phenom XL benchtop SEM with Perception GSR Software

Phenom GSR

Fully automated analysis of gunshot residue

Product Image of the Phenom Pure desktop SEM

Phenom Pure

An incredible value for entry-level SEM


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Specification

Phenom Pharos

Phenom XL / ParticleX / GSR *

Phenom Pro / ProX

Phenom Pure

Electron Source Field Emission Gun (FEG) CeB6 crystal CeB6 crystal CeB6 crystal
Max. SEM Magnification 1,000,000x 200,000x 350,000x 175,000x
SEM Resolution – SED 2.5 nm 10 nm 6 nm 15 nm
SEM Resolution – BSD 4 nm 10 nm 8 nm 15 nm
Acceleration Voltages 2 – 15 kV 5 – 20 kV 5 – 20 kV 5 kV or 10 kV
Navigation Camera
Motorized Stage
Vacuum Options High, medium, and low vacuum (software selectable) High, medium, and low vacuum (software selectable) High and low vacuum sample holders High and low vacuum sample holders
Sample Handling Single pin stub
25 mm diameter
Up to 36 pin stubs
100 mm x 100 mm
 Single pin stub
25 mm diameter
 Single pin stub
25 mm diameter
Detectors BSD – Four-quadrant backscattered electron detector (standard)
SED – Everhart-Thornley secondary electron detector (optional)
EDS/EDX/EDAX – Integrated energy dispersive x-ray spectrometer (optional)
Learn More View Pharos View XL
View ParticleX
View GSR
View Pro / ProX View Pure
* ParticleX and GSR models are built on Phenom XL hardware with the addition of the Perception automation software.