Desktop SEM Models

The largest sample chamber on a desktop platform – our most popular model

All-in-one system for high resolution imaging and EDS

Achieve ultimate resolution with the world’s only desktop field emission SEM (FE-SEM)

Fully automated particle analysis with customized packages for technical cleanliness, additive manufacturing, or steel inclusions

Fully automated analysis of gunshot residue

An incredible value for entry-level SEM

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* ParticleX and GSR models are built on Phenom XL hardware with the addition of the Perception automation software.
Specification	Phenom Pharos	Phenom XL / ParticleX / GSR *	Phenom Pro / ProX	Phenom Pure
Electron Source	Field Emission Gun (FEG)	CeB₆ crystal	CeB₆ crystal	CeB₆ crystal
Max. SEM Magnification	2,000,000x	200,000x	350,000x	175,000x
SEM Resolution – SED	<2.0 nm	10 nm	6 nm	15 nm
SEM Resolution – BSD	3 nm	10 nm	8 nm	15 nm
Acceleration Voltages	1 – 20 kV	5 – 20 kV	5 – 20 kV	5 kV or 10 kV
Navigation Camera	✔	✔	✔	✔
Motorized Stage	✔	✔	✔	✔
Vacuum Options	High, medium, and low vacuum (software selectable)	High, medium, and low vacuum (software selectable)	High and low vacuum sample holders	High and low vacuum sample holders
Sample Handling	Single pin stub 25 mm diameter	Up to 36 pin stubs 100 mm x 100 mm	Single pin stub 25 mm diameter	Single pin stub 25 mm diameter
Detectors	BSD – Four-quadrant backscattered electron detector (standard) SED – Everhart-Thornley secondary electron detector (optional) EDS/EDX/EDAX – Integrated energy dispersive x-ray spectrometer (optional)
Learn More	View Pharos	View XL View ParticleX View GSR	View Pro / ProX	View Pure