Sample-Electron Interaction

The scanning electron microscope (SEM) produces images by scanning the sample with a high-energy beam of electrons. As the electrons interact with the sample, they produce secondary electrons, backscattered electrons and characteristic X-rays. These signals are collected by one or more detectors to form images which are then displayed on the computer screen. When the electron beam hits the surface of the sample, it penetrates the sample to a depth of a few microns, depending on the accelerating voltage and the density of the sample. Many signals, like secondary electrons and X-rays, are produced as a result of this interaction inside the sample.

Electron beam interaction

Schematic of electron beam interaction

The maximum resolution obtained in an SEM depends on multiple factors, like the electron spot size and interaction volume of the electron beam with the sample. While it cannot provide atomic resolution, some SEMs can achieve resolution below 1 nm! Typically, modern full-sized SEMs provide resolution between 1-20 nm whereas desktop systems can provide a resolution of 20 nm or more.


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