The Phenom XL pushes the boundaries of desktop SEM. It features the proven ease of use and fast workflow of the Phenom series but has the largest sample chamber of any desktop SEM, and offers an unprecedented opportunity for automation.
The Phenom XL has the largest sample stage of any tabletop SEM while maintaining all of the advantages of the original Phenom platform.
- Fastest vent/load cycle for high throughput
- Motorized XY stage
- Color optical camera for single-click navigation
- Charge reduction mode reduces need to coat samples
- Elemental analysis with EDS option
- Secondary electron detector option
- Small footprint
- No infrastructure needed
The Phenom XL comes equipped with a chamber that allows analysis of large samples. Sample loading is simple and easy and the proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world. Samples can be tilted and rotated with the Eucentric Sample Holder.
|Optical navigation camera||3 – 16x magnification; color image; bright-field & dark-field illumination|
|SEM magnification||Max. 100,000x|
|Resolution||< 10 nm|
|Digital zoom||Max. 12x|
|Acceleration voltages||5 – 20 kV|
|Vacuum modes||High, medium, and low vacuum|
|Sample size||Max. 100 mm x 100 mm
Up to 36 x 12 mm pin stubs
|Sample height||Max. 65 mm|
|More info||Compare with the P-Series Models|