Scanning Electron Microscopes

The fastest electron microscopes for high-quality imaging and analysis.

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Phenom XL

Product Image of the Phenom XL

The Phenom XL pushes the boundaries of desktop SEM. It features the proven ease of use and fast workflow of the Phenom series but has the largest sample chamber of any desktop SEM, and offers an unprecedented opportunity for automation.

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Features

The Phenom XL has the largest sample stage of any tabletop SEM while maintaining all of the advantages of the original Phenom platform.

  • Fastest vent/load cycle for high throughput
  • Motorized XY stage
  • Color optical camera for single-click navigation
  • Charge reduction mode reduces need to coat samples
  • Elemental analysis with EDS option
  • Secondary electron detector option
  • Small footprint
  • No infrastructure needed

Sample Holder for Phenom XL Scanning Electron Microscope

Accessories for the Phenom XL

The Phenom XL comes equipped with a chamber that allows analysis of large samples. Sample loading is simple and easy and the proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world. Samples can be tilted and rotated with the Eucentric Sample Holder.

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Phenom Pro Suite Interface for Phenom Scanning Electron Microscopes

Phenom Software

Software options are available to meet your SEM needs, including automated and market-specific solutions. Energy dispersive X-ray spectroscopy (EDS) can be added to analyze the elemental composition of samples.

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Specifications

Category XL Specification
Optical navigation camera 3 – 16x magnification; color image; bright-field & dark-field illumination
SEM magnification Max. 100,000x
Resolution < 10 nm
Digital zoom Max. 12x
Acceleration voltages 5 – 20 kV
Vacuum modes High, medium, and low vacuum
Detectors BSD
EDS (optional)
SED (optional)
Sample size Max. 100 mm x 100 mm
Up to 36 x 12 mm pin stubs
Sample height Max. 65 mm
More info Compare with the P-Series Models