QSense Knowledge base
– Tech Note –
Optimizing Chemical Mechanical Planarization (CMP) Processes with QCM-D
Chemical mechanical planarization (CMP), also called chemical-mechanical polishing, is…
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Biolin QCM-D Instruments
QSense™ Modules
Product Overview
The QSense QCM-D systems come equipped with standard flow modules, which enables a wide variety of aqueous and gas-phase experiments. Many other specialized modules are available to support experiments that require the use of additional technologies in combination with QCM-D or involve extreme temperature and/or pressure conditions. These plug-and-play modules offer expanded capabilities such as electrochemical impedance spectroscopy (EIS), ellipsometry, fluorescence or optical microscopy, and more.
QSense Flow Module
This standard QSense Flow Module is included with the Explorer (one module) and Analyzer (four modules) instruments. The standard flow modules offer high flexibility in terms of chemical compatibility (aqueous and non aqueous), flow conditions (static and flow), temperature, and gas phase measurements at atmospheric pressure. The brilliant design of the flow module ensures a homogenous flow profile leading to even sample exposure, reduced risk of trapping air bubbles, and excellent thermal stability.
The parts of a standard flow module that are exposed to the fluid are the body of the module made of titanium, and the O-rings and sealing gaskets made of Viton. More chemically resistant materials are available upon request.
Ideal for liquid-based experiments for monitoring mass and viscoelastic changes of surfaces.
QSense Teflon™ Flow Module
The PTFE Flow Module is suitable for flow or stagnant measurements where the reagents or molecules are sensitive to interactions with titanium. The Teflon™ flow module is similar to the QSense standard Flow Module but the titanium flow part is exchanged for Teflon™-like (PTFE).
The parts exposed to liquid in a Teflon Flow Module are the flow chamber of the module made of Teflon and O-ring made of Viton. More chemically resistant options are available upon request. QSense Teflon Flow Module is useful for the samples that contain harsh chemicals that may etch the titanium, or the samples that may interact with titanium and aggregate on the titanium in the standard flow module.
QSense Open Module
The open module is an optional module compatible with all Q-Sense systems. It is designed for low volume (10 – 300 µl) samples. The Open Module allows direct access to the sensor surface where minimal amount of samples can be directly pipetted to cover the sensor surface. A Teflon lid is included to avoid evaporation of samples and to improve measurement stability.
Ideal for evaporation studies, deposition from low volume samples, and external triggered reactions.
QSense Humidity Module
Compatible with all QSense systems, the humidity module enables QCM-D measurements in a humidity controlled enviroment. The sensor surface of this module is separated from the liquid flow by a GORE™ membrane, creating an air-filled compartment over the sensor. Flowing saturated salt solutions over the membrane will generate a specific and controlled relative humidity in the volume above the sensor surface.
Typical applications include vapor uptake and release by the film coated on sensor surface, swelling and shrinking of the polymer films in humid environment and stability of film under certain relative humidity.
QSense Electrochemistry Module
The QSense Electrochemistry Module allows for simultaneous Quartz Crystal Microbalance with Dissipation Monitoring and Electrochemical measurements (EQCM-D) or QCM-D and Electrochemical Impedance Spectroscopy (EIS) measurements (Technology note). The design enables flow measurements and withstands the harsh conditions necessary for some electrochemistry applications.
QSense Electrochemistry Window Module
The QSense Window Electrochemistry Module is designed to combine Quartz Crystal Microbalance with Dissipation Monitoring and Electrochemical measurements (EQCM-D) with microscopy. The module can also be used to perform light sensitive EC experiments combined QCM-D. The window, made from a 1 mm thick quartz or sapphire glass microscopy slide allows optical access to the sensor surface that also acts as working electrode (WE). A platinum ring sputtered on glass window acts as a counter electrode (CE) The reference electrode (RE) is placed in the outlet flow path.
QSense Window Module
Compatible with all QSense systems, this optional flow cell module allows for optical access to the sensor surface through sapphire window for studying the light induced reactions and fluorescence detection. When combined with the compactly designed QSense Explorer chamber platform, which fits most upright and fluorescence microscope stages, optical microscopy of the sensor surface is possible.
QSense Ellipsometry Module
The QSense ellipsometry module enables simultaneous QCM-D flow experiments and ellipsometric measurements on the same substrate. The complementing measurements allow for greater insight into the hydration properties of the surface and molecules being measured.
The ellipsometry module is used in the Explorer or Orbit chamber which can be mounted on the stage of the ellipsometer (not included) due to their compact design.
QSense ALD Holder
QSense® ALD Holder provides the most stable form of QCM integrated in your vacuum/pressure vessel setup. The holder is open on both sides of the sensor to prevent uneven pressure changes. A common application is Atomic Layer Deposition (ALD).