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Phenom Pro/ProX Desktop SEM

Phenom Knowledge base

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Phenom Desktop SEM

Phenom Pro / ProX Desktop SEM

ChemiSEM / Chemiphase Now Available!

Learn more about live EDS & instant elemental mapping

Product Overview

The Phenom Pro and ProX desktop SEMs are high-performance SEMs for the ultimate all-in-one imaging and X-ray analysis systems. A unique and powerful core architecture combines with a host of hardware and software features to provide the most complete desktop SEM solution on the market. Phenom SEMs are equipped with a high brightness Cerium Hexaboride (CeB6) source, allowing for better image resolution through the range of accelerating voltages and a longer source lifetime compared to tungsten sources.

Superior Imaging

High brightness, long lifetime CeB6 source

Fastest SEM Available

30 seconds from loading to electron imaging

Ease of Use

Designed to be easy to use for both new and experienced users


Phenom Pro can be easily upgraded to the ProX on-site

Phenom Pro / ProX Features

The Phenom Pro desktop SEM is optimized to be the ultimate all-in-one imaging system for any application. For those wanting X-ray elemental analyses, the Phenom ProX comes with our EDS detector. This analysis is fully integrated into our updated user interface, which allows for seamless operation for both new and experienced users.

The innovative design of the Phenoms provides a list of advantages over other desktop SEMs:

  • Multiple acceleration voltages (4.8-20.5kV)
  • Color optical camera for single-click navigation
  • Charge reduction mode reduces need to coat samples
  • Upgrade to ProX for fully integrated elemental analysis with EDS detector option
  • Secondary electron detector option
  • Small footprint – no infrastructure needed
  • Low maintenance
  • High stability with vibration isolation design
  • Multiple sample holders are designed for optimizing sample imaging

Talk to an Instrumentation Specialist Today!

The Power of Phenom

Product Features

Minimal Maintenance

Phenoms are always ready for immediate operation with very low downtime. Unlike tungsten filament-based SEMs which require frequent replacements, electron source changes of Phenoms are far and few between due to incredibly long source lifetimes.

Intuitive Operation and Software

The operating software of each Phenom is clear and navigable, offering easy mouse click and keyboard control with intuitive adjustment of all electron beam settings and imaging parameters — without relying on overwhelming menus or convoluted tutorials.

Vibration Insensitivity

The Phenom is the only SEM that is insensitive to vibrations. It can be used in noisy environments and does not require special tables or vibration isolation platforms.

SEM Image Gallery

Phenom Pro/Prox Image Gallery

Videos & Demos

Phenom Pro / ProX Videos & demos

See Available Detectors

Phenom Desktop SEM Detector Options

The Phenom Pro/ProX desktop SEM is compatible with several detectors, including:

The backscattered electron detector (BSD) and secondary electron detector (SED) are responsible for detecting electrons resulting from interactions between the electron beam and sample surface. The two detectors collect different signals that convey varying information about atomic numbers and surface topography.

Energy dispersive X-ray spectroscopy (EDS) provides semi-quantitative elemental composition information by analyzing the X-rays released from atoms when irradiated with electrons. EDS is a non-destructive method for identifying compounds on micro and nanoscales, displayed through colorized elemental mapping.

See available Sample Holders

Phenom P-Series Desktop SEM Sample Holders

The Phenom P-Series lineup of desktop SEMs is comprised of the Pharos, Pro/ProX, and Pure systems, each compatible with a variety of sample holders for highly specialized applications.

Revealing the hidden features of samples is made possible with the Motorized Tilt & Rotation sample holder. This holder allows for angular tilting and rotation of the sample stage, allowing for imaging of the same area from multiple angles and improved visualization of three-dimensional structures.

The Microtool Sample Holder features an iris style clamp, specially designed for securely holding axially shaped objects or samples with a high aspect ratio. Ideal for observing drill bits, milling tools, and injection needles, simply secure the sample with a non-destructive clamping mechanism and start imaging within minutes.

The Charge Reduction Sample Holders effectively reduces electric charge buildup, minimizing the amount of preparation needed to analyze nonconductive samples. Paper, polymers, organic materials, ceramics, glass, and coatings are but a few of the materials accommodated by these holders.

The Temperature Controlled Sample Holder protects sensitive specimens and enables imaging of hydrated samples by Peltier cooling and heating. With a temperature range of -25°C to 50°C, samples can be maintained at sub-zero temperatures to prevent damage from the vacuum and electron beam.

The Electrical Feedthrough Sample Holder enables in-situ electrical measurements. The holder has six quick release pins that can be used to measure or apply voltages and currents to the sample while it is under the SEM column. This holder is ideal for observation of MEMS devices and for performing failure analysis.

The Metallurgical Sample Holder is designed to support resin-embedded samples. It comes in two variations – standard and charge reduction, with the option for two sizes of inserts. This holder speeds up SEM analysis for metallurgical samples.

sample Preparation

Sample Preparation Tools

Ensure crisp imaging and high quality analysis with automated sample preparation tools.

Reduce electric charging and improve SEM image quality with uniform gold and platinum coatings.

Quickly prepare artifact-free samples for high quality EBSD, failure analysis, and cross-sectional analysis.

The Nebula is designed to aid in the preparation of powder samples for analysis in an SEM

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