Scattering Particle Analysis
Sample Scanner Particle Detector
The Fastmicro Sample Scanner is a compact inspection tool for indirect surface particle measurement using innovative surface sampling tape. Compatible with a wide variety of materials and surface geometries, including rough, curved, and difficult-to-reach surfaces, the tool delivers fast, accurate, and quantitative cleanliness measurements in seconds through repeatable, residue-free sampling.
Fast & Reproducible Results
Detection and quantification of sub-micron particles in seconds with an efficient & repeatable surface sampling method
Residue-Free Sampling
The residue-free sampling workflow enables non-destructive cleanliness verification on critical components and surfaces
ISO Standardized Reporting
Automatically generate reports in line with ISO 14644-9, or customize reporting to your own cleanliness specifications.
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Quantitative surface cleanliness validation in seconds, on virtually any surface
The Sample Scanner brings surface particle inspection out of the laboratory and onto the production floor. Fastmicro’s ultra-clean sampling tape lift particles from a surface and transports them in a clean transport container directly to the scanner, enabling robust measurements across a wide variety of surfaces without cross-contamination. Measurements are non-destructive and fully repeatable, and particle location data can be exported directly into correlative scanning electron microscopy (SEM) workflows for targeted follow-up analysis.
Fastmicro Sample Scanner
Product Features
Residue-free sampling on virtually any surface
The combination of scanner and surface sampling tape enables robust measurements across a wide variety of materials and surface geometries including curved, rough and difficult to reach surfaces. The surface sampling tape collects particles with a removal efficiency greater than 90%, without causing cross-contamination or leaving measurable residue.
Simple Operation with Fast Results
Samples are measured within seconds, supporting an operator workflow of under a minute. Simple, multi-recipe selection makes the instrument suitable for operators in manufacturing environments that need quick and reproducible results. Advanced functionality supports teams in research and development.
Quantitative sub-micron detection
A field of view up to Ø20 mm enables inspection of an entire sample in a single scan. The Sample Scanner provides quantitative detection and PSL equivalent sizing of sub-micron particles using NIST-traceable calibration.
ISO 14644-9 Standardized Reporting
The system reports on surface cleanliness validation according to ISO 14644-9. This standard defines the classification of surface cleanliness in production and cleanroom environments.
Fastmicro Sample Scanner
Product Accessories
Surface Particle Sampling Kit
The Fastmicro Surface Particle Sampling Kit enables Sample Scanner users to collect and measure surface particles using a proprietary sampling tool, improving operator handling, sampling consistency, and enabling inspection of larger surface areas. The kit includes everything needed to get started, including the sampling tool, hardware interfacing, software recipe, and surface sampling tapes specifically designed for use with the applicator tool.
Sampler
The Fastmicro sampler is designed for consistent force application, ensuring highly repeatable particle collection and ease of use. The surface sampling tape collects sub-micron particles with greater than 90% removal efficiency across a wide variety of materials and surface geometries, without leaving measurable residue.
SEM Stub
This SEM stub enables follow-up analysis of Fastmicro’s surface sampling tape in a scanning electron microscope (SEM). Using the particle coordinates generated by the Sample Scanner, individual particles can be rapidly located for targeted SEM-EDS analysis. This integrated Sample Scanner–SEM workflow significantly accelerates root-cause analysis and enhances contamination control.
2-inch Wafer Interface
Enables Particle Deposition measurements using standard 2-inch silicon wafers as particle traps, eliminating costly custom substrates. Includes the hardware interface required for Sample Scanner measurements, while the high-vacuum compatible wafer holder enables process monitoring and contamination control in both ambient and vacuum environments.
Fastmicro Sample Scanner
Software
Particle Analysis Software
Fastmicro’s software can be used on the instrument or on your own PC to bring the Sample Scanner’s measurement post-processing and advanced analysis outside the cleanroom with full access to your data. Generate a qualification report from a single measurement or compare pre- and post-process results through the adder-analysis database interface, then tailor reporting to customer or in-house specifications.
