Phenom XL Desktop SEM ParticleX

Phenom desktop SEM - EDS map of an electronic chip
Tabletop SEM image of tin spheres

Meteorite EDS Map


Lily Pollen

Integrated circuit EDS map

Integrated Circuit EDS Map

Tin spheres

Tin Spheres

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Phenom XL Desktop SEM with ParticleX Software
Automated EDS + Particle Analysis

Timely and accurate quality control are prerequisites for today’s manufacturing. The Thermo ScientificTM Phenom Particle X Desktop SEM is a versatile in-house solution for high-quality analysis. Automatically size and identify elemental composition with integrated particle sizing and EDS. Giving you the ability to carry out analysis, verification and classification of materials, supporting your production quickly with accurate and trusted data.

The Phenom XL Desktop SEM is equipped with the fastest vent/load cycle and the largest sample stage on a desktop SEM platform. Combining the compact size with the fast and accurate staging, the Phenom XL Desktop SEM with ParticleX Software is designed for high throughput of sample analysis.

Simple to operate and fast to learn, the Phenom ParticleX Desktop SEM allows you to train multiple users in-house to acquire the data needed to solve your problems. The ease-of-use and automation allows you to offload sample analysis from other SEMs in your laboratory.

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The Phenom ParticleX Desktop SEM was designed for specialized applications of microscale particles analysis of metal powder for the additive industry and technical cleanliness VDA19 specification or ISO 16232 standard for the automotive industry. Featuring the largest sample stage of any desktop SEM while maintaining all of the advantages of the original Phenom platform.

  • Fastest vent/load cycle for high throughput
  • Motorized XY sample stage
  • Color optical camera for single-click navigation
  • Charge reduction mode reduces need to coat samples
  • Elemental analysis EDS/EDX option
  • Secondary electron detector option
  • Small footprint
  • No infrastructure needed

Phenom Desktop SEM Automated EDS Analysis

Automated Energy Dispersive X-ray Spectroscopy (EDS) and Particle Analysis

The fully integrated EDS detector with dedicated software package for Element Identification (EID) of particles. Analysis and imaging go hand-in-hand to allow users to identify nearly all materials on the periodic table from Boron to Americium. The real-time mapping EID software runs smart algorithms with advanced peak analysis to optimize the automatic-identification while still allowing for manual adjustments by the user. The intuitive step by step process withing the software helps the user collect all X-ray results in an organized and structured way.


Category Phenom ParticleX Desktop SEM Specifications
Optical navigation camera 3 – 16x magnification; color image; bright-field & dark-field illumination
SEM magnification Max. 100,000x
Resolution < 14 nm
Light Optical Bright field/dark field modes
Electron Optical
  • Long lifetime thermoinic source (CeB6)
  • Multiple stable beam currents
Acceleration voltages 4.8 – 20 kV
Vacuum modes High, medium, and low vacuum
Detectors BSD
SED (optional)
Sample size Max. 100 mm x 100 mm
Up to 30 x 12 mm pin stubs
Sample height Max. 65 mm
More info Compare Scanning Electron Microscope Models